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The JSM-6490 is a high-performance, scanning electron microscope with a high resolution of 3.0nm. Its asynchronous five-axis mechanically eucentric stage with compeucentric rotation and tilt can accommodate a specimen of up to 8-inches in diameter (12-inches loadable). Standard automated features include Auto Focus/Auto Stigmator, Auto Gun (saturation, bias and alignment), and Automatic Contrast and Brightness.
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