High lateral resolution
Imaging Ellipsometry offers a lateral (spatial) resolution of down to 1 micrometer (Nanofilm EP³). Standard Ellipsometers typically have 100 - 500 microns. For that reason, our system is ideally suited to measure structured surfaces, small surfaces or to check surface inhomogeneities etc. Of course, Imaging Ellipsometers provide identical resolution for the z-direction (thickness) with better than 0.1 nm.
Imaging allows you to have a direct view on the sample!
You'll see a direct image of your sample from the CCD-camera. This image already exhibits ellipsometric contrast, which allows you to analyse qualitatively the homogeneity of your sample or to decide whether surface structures are as they should be.
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