Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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Our AXXIS™ deposition systems facilitate multiple deposition techniques and handle co-deposited films efficiently. Versatile chamber design allows for door- or port-mounted substrate fixtures and service well mounted electron beam source.
18" diameter x 15" deep cylindrical 304 stainless steel chamber
6 radial process ports
Hinged front-loading door with viewport
Turbomolecular or cryogenic pumping
Available with up to 6 TORUS® circular magnetron sputter sources
Available with up to 3 thermal evaporation sources
Enclosed framework for electronics features compact footprint
3cm filamentless ion source (optional)
Load lock (optional)
Substrate fixture indexing and rotation (optional)
Computer-controlled process automation (optional)

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List of all articles in this sub-category Vacuum components and systems

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