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High-Speed, Ruggedized, Wafer-Scribing Laser System

The AccuScribe AS2000FX is a revolutionary breakthrough in New Wave Research's acclaimed family of diode-pumped, solid-state, (DPSS) LED wafer-scribing systems. Not just a product enhancement but a complete redesign, the AS2000FX slashes operating costs with ten wafer-per-hour throughput and an exceptionally rugged platform optimized for demanding 24/7 environments.

High-speed performance is assured via the latest in high-efficiency, high-stability, UV DPSS laser technology and our advanced optical and image-processing technologies. The platform provides four-inch wafer support capability and is easily customized for various customer requirements. Features include a highly accurate, repeatable and reliable X-Y stage, user-selectable energy output with stability feedback loop, advanced debris removal system and many other options to increase ease-of-use and productivity.

Further, a patented wafer edge detection system that enables the operator to scribe every inch of precious wafer real estate and scribe partial or broken wafers - very important to customers as it dramatically increases their yields. Also, backside alignment capability - another feature unique to the AccuScribe - enables scribing from the backside of wafers when opaque wafer materials make topside alignment and scribing impossible.

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List of all articles in this sub-category Laser components and systems

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