Beam Shaping for Semiconductor Process Technology

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LIMO manufactures the high-resolution homogenisation systems exclusively as customized systems, optimised for the respective application. As an option, the optics are also equipped with mechanical precision holders for mounting in the machine.

LIMO Beam Transformation Systems used in semiconductor process technology are helping to set new standards for yield and throughput. Rugged, maintenance-free and insensitive Plug & Play solutions ensure worldwide an uninterrupted and reliable production operation. The beam transformation systems act as an intermediary between the laser source and the application. They improve the intensity and angle distribution of the mask illumination for the fabrication of smallest structures for the manufacture of fast electronic components. For a given light source wavelength, beam transformation systems allow even smaller structure sizes on the silicon wafer to be achieved. The systems achieve the homogeneous mask illumination, with simultaneous large far-field angles, by using LIMO homogenisers. These are based on optimised micro-lens wafers having a layout that takes into account the special requirements of micro-lithography.

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