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Category : Chemistry, biochemistry, electro-chemistry (laboratory precision equipment, devices and supplies) > Plasmas

Built-in plasma gun used in vapor deposition processes

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The use of plasma for enhancing the quality and function of thin film production by physical vapor deposition (PVD) and chemical vapor deposition (CVD) is becoming indispensible. The Built-in Plasma Gun is compact, and can be easily employed in the plasma assisted vapor deposition process.

Features:

Thermal cathode arc discharge
Two types of output beams:
-reflected beam
-irradiation beam

Article from Jeol


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