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Category : Semiconductor equipment > Wafer test/inspection and measurement systems

Cameca TXRF 8300W measurement system

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The CAMECA TXRF 8300W is a turnkey system designed to meet the needs for fully automated semiconductor fab application.
The TXRF 8300W measures Quantitative Trace Element Surface Contamination on semiconductor wafers, down to less than 1E10 atoms/cm² in direct measurement. Surface preparation (VPD) can improve this by almost three orders of magnitude

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