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Category : Optics (components, coatings, instruments and systems) > Optical coatings, materials & substrates

D-Star system designed to coat precision thin-films on substrates

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Intevac offers deposition equipment for flat panel display manufacturing. The D-Star provides flexible system architecture based on a common set of hardware options and are designed to uniformly coat precision thin-films on substrates as large as 1.2 meters x 1.6 meters (4 feet x 5 feet).

Customers can choose a cluster tool configuration with up to eight (8) independently controlled process modules, a small system for processing one or two-layer film stacks, or an in-line system configuration, all of which are built upon the same substrate handling, transport and source technologies.

Article from Intevac Corporation


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