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Category : Optics (components, coatings, instruments and systems) > Light sources, lamps

Deep ultraviolet short arc lamp

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Uses: The deep ultraviolet radiation is produced by a mercury-xenon plasma. The exact concentration of mercury-xenon must be carefully controlled during lamp manufacturing to obtain the maximum input power to output radiation conversion. The deep ultraviolet short arc lamps are used for photoresist stabilization, and photolithography.

Article from Advanced Radiation Corporation


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