Category : Vibration control equipment, optical tables > Vibration control equipment

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Electro-Damp® PLS is a new approach to the height control of pneumatic vibration isolation systems.
Typically, air isolators are self-leveling and rely upon mechanical valves and a mechanical linkage to sense and maintain the position of an isolated surface. TMC's EPPSand PEPS® were the first non-contacting height control systems to incorporate electronic height control valves and analog controls. The approach of using non-contacting height control systems has become an attractive method for metrology and microlithography tool designers to control static and dynamic position. Non-contacting control eliminates wear issues and maintains a high level of repeatability over long periods of time while providing the highest possible level of vibration isolation.
The Electro-Damp PLS builds upon TMC's PEPS® technology by incorporating our DC-2000 Digital Controller to greatly expand the available options and interfaces. In particular, the Electro-Damp PLS incorporates an Information Feedforward function allowing for dramatically less vertical displacement of the isolated surface and improved leveling times in response to weight shifts caused by stage motion. Feedforward is a technique in which information controlling the position of a motorized stage is used to "anticipate" stage motion and the corresponding change in pressure required in each pneumatic isolator required to offset this motion. Typically, such information is taken from the stage motion controller. This technique is simple, requires no additional sensors, has no feedback (making it inherently stable), and is relatively inexpensive. Feedforward can often achieve up to a five-fold improvement in displacement and leveling time.

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List of articles in this sub-category

- Standard Wire Rope Isolators
- Type II Faraday Cage
- STACIS® 2100 Active Piezoelectric Vibration Control System
- Mag-NetX Magnetic Field Cancellation System
- Acoustic/Vibration Isolation Chamber
- Faraday Cages electro-magnetic isolation system

List of all articles in this sub-category Vibration control equipment

List of all articles in this sub-categoryList of all articles in this sub-categoryList of all articles in this sub-category