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Category : Semiconductor equipment > Electrochemical capacitance voltage profiler
Electrochemical Capacitance Voltage Profiling
The patent-pending ECVPro (electrochemical capacitance voltage profiler) is the result of a total redesign that completely redefines ECV profiling. We have taken 25 years of ECV profiling experience and coupled it with 25 years of advances in instrument control technology to produce the most precise, most reproducible, most highly-automated electrochemical CV profiler ever. The ECVPro was designed, from the ground up, to eliminate all operator dependent variations in the data. All the operator has to do is set the wafer on the stage. After initial setup, the ECVPro takes care of everything else.
Article from Accent Optical Technologies
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