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Category : Spectroscopy, colorimetry, photometry, fluometry > Spectrophotometry

FilmTek 2000 fiber-optic spectrophotometer

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FilmTek™ 2000 is a breakthrough in thin film metrology technology. FilmTek™ 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for the simultaneous measurement of film thickness, index of refraction, and extinction coefficient. FilmTek™ 2000 provides unmatched accuracy, ease of use, and analytical power in a fully integrated package.

Versatile: FilmTek™ 2000 incorporates SCI’s generalized material model with advanced global optimization algorithms for simultaneous determination of:



- Multiple layer thicknesses
- Indices of refraction [ n(l ) ]
- Extinction (absorption) coefficients [ k(l ) ]
- Energy band gap [ Eg ]
- Constituent and void fraction
- Surface roughness

Optional features:
- Computer controlled automated stage
- Microscope based system for spot sizes as small as 5mm
- Cassette to cassette wafer handling

Article from Scientific Computing International


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