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Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

HPS® Vacuum Transducer & Vacuum Gauge Controller Systems

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For vacuum measurement from 10-11 to 10,000 Torr, MKS offers a broad range of vacuum gauge, vacuum controller and vacuum transducer products, including Pirani, convection Pirani, piezo, hot cathode, cold cathode and new MEMS-based multi-sensor technology. The MKS line of vacuum gauges includes Series 900 vacuum transducers which are vacuum sensors and electronics combined into a single device, as well as the traditional, easy-to-operate vacuum gauge controller/sensor combination.

Vacuum Transducers
MKS' comprehensive line of vacuum transducers collectively measure from 10-10 to 1500 Torr and includes MEMS-based MicroPirani and piezo vacuum sensors. Their compact size, low cost, expanded pressure measurement range and direct atmospheric pressure readings make the Series 900 transducers an ideal solution to any vacuum system design. Digital output and communication in a variety of formats, in addition to analog output, make these gauges easy to implement.

Article from MKS Technology for Productivity


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