Category : Motion control, positioning stages > Micropositioning (components and systems)

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The new M-824 Hexapod 6D micropositioning and alignment system from PI provides high resolution motion in 6 degrees of freedom. It is designed to work in vacuum environments and combines multiaxis motion to 50 mm / 36 degrees with sub-micron resolution and
repeatability. The greatest Hexapod advantage is its compact size compared to conventional six-axis positioning systems, a fact that is especially beneficial in applications in vacuum chambers, where space is at a premium.

Typical Applications: X-ray microscopy, X-ray monochromators, multi-axis alignment of optics, semiconductor technology

General Features & Advantages of Hexapods
Compared to conventional stacked "serial" kinematics 6D micropositioning systems the
Hexpod (parallel kinematics) approach has the following advantages:

- Smaller Envelope for Easy Integration
- Higher Stiffness and Minimized Inertia for Faster Response and Alignment
- No Moving Cables (No Friction) for Increased Reliability and Repeatability
- Center of Rotation can be Changed with One Software Command
- No Accumulation of Runout Errors—Better Multi-Axis Repeatability

Features of the M-824 Hexapod:


- 10 kg Load Capacity
- Compact size: 280 mm Diameter x 190 mm Height
- Design Resolution: <0.01 µm
- Minimum Incremental Motion: 0.2 µm
- Repeatability: < 0.5 µm
- Linear Travel Ranges : to 50 mm
- Rotary Travel Ranges: to 36 deg.
- Vacuum Compatible to 10-6 hPa
- Powerful Controller and Software for Alignment

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List of all articles in this sub-category Micropositioning (components and systems)

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