Category : Motion control, positioning stages > Nanopositioning (components and systems)

PRINT

BACK

PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for optics, nanotechnology, photonics, semiconductor and life science applications, offers has designed a unique high-load Hexapod for astronomy applications and other alignment tasks.

The high-load Hexapod combines extremely high precision with a load capacity of up to 1000 kg. It provides minimum incremental motion to 0.8 µm and 1 µrad, respectively. The six individual actuators have a design resolution of 0.08 µm and a stiffness of 40 N/µm.

Features:
- 1000 kg Load Capacity (Vertical)
- Six Degrees of Freedom
- Works in Any Orientation
- No Moving Cables for Improved Reliability and Precision Repeatability to 0.5 µm Actuator - Resolution 0.008 µm Vacuum-Compatible Versions Linear and Rotary Multi-Axis
- Scans Virtualized Center of Rotation (Pivot Point) Sophisticated Controller Using Vector - Algorithms Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications

- Hexapod Working Principle and Advantages:
The M-850 Hexapod is driven by six high-resolution actuators all connected directly to the same moving platform. The principle is similar to that seen in flight simulators, but considerably more precise. In place of the hydraulic actuators used there, the M-850 uses custom high-load precision screws and servo-motors. It can withstand loads of 1000 kg vertically, and at least 180 kg in any direction.

Technical Specifications: Number of Axes:
Linear travel range XYZ: 24 mm
Rotation range: 8 deg. (rot z) 6 deg. (rot x, y)
Actuator design resolution: < 0.08 µm
Minimum incremental motion XYZ: 0.8 µm
Minimum incremental motion Rot xyz: 1 µrad
Repeatability X, Y: 1 µm
Repeatability Z: 0.5 µm
Max Linear Velocity XYZ: 0.5 mm/s
Max Rotary Velocity: 6 mrad/s
Actuator Stiffness: 40 N / µm
Load capacity: up to 1000 kg (depends on orientation)
Weight: 450 kg

- Typical Applications:
Alignment and tracking of optics, electron beams; fine positioning of active secondary mirror platforms in astronomical telescopes

List of all articles from this supplier

- M-403 / M-414 series linear translation stages
- Hybrid Z-nanopositioning system employing piezoelectric and DC-motor drives
- Closed-loop P-628.2CD XY piezoelectric stages
- Miniature translation / rotation stage family
- Modular controller for piezo-driven nanopositioning systems
- Compact XYZ-Micropositioning Stages with Piezo Option

List of all articles from this supplier

List of articles in this sub-category

- NMM-1 Nano Positioning and Nano Measuring Machine
- NAGO-P24-8 Goniometer
- Motorized Positioning Stages
- NTS-10 and NTS-100 Linear Nanopositioners
- Six-Axis Hexapod Precision Alignment System for Astronomy
- M-403 / M-414 series linear translation stages

List of all articles in this sub-category Nanopositioning (components and systems)

List of all articles in this sub-categoryList of all articles in this sub-categoryList of all articles in this sub-category