Category : Semiconductor equipment > Wafer test/inspection and measurement systems

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The CAMECA IMS 7f is a magnetic sector SIMS with top performances in trace element depth profiling and secondary ion microscopy.
Its unique stigmatic optical system allows both direct ion microscopy and scanning microprobe mode.
The High Mass Resolution capability permits true elemental analysis by eliminating the numerous interfering ions (56Fe/28Si2, 31P/30SiH, 32S/16O2...). The HMR capability ensures the instrument's long life, especially in fields (semiconductors) where materials and thus analytical problems (i.e., mass interferences) change rapidly.
The magnetic sector analyzer allows to work with a high DC extraction field; accordingly, analyzer transmission is higher by two orders of magnitude than with quadrupole analyzers. High transmission is absolutely necessary for performing analyses or profiles on small areas (ex: 100 µm test pads in semiconductor, or µm size particle analysis), while maintaining excellent detection limits (down to the ppb level).

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List of all articles in this sub-category Wafer test/inspection and measurement systems

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