Category : Spectroscopy, colorimetry, photometry, fluometry > Spectroscopic ellipsometry

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Infrared variable angle spectroscopic ellipsometer. An excellent tool for research in semiconductors, polymers, and much moreSpectral Range: 2 to 30 microns
Rotating compensator (RCE) configuration
This configuration provides accurate "Delta" data from 0° to 360° as well as advanced measurement capabilities.
High precision automated angle.
Optics Applications
-Highly accurate IR optical constants (n&k) from 2 to 30 microns
-reflected phase shift (direct measurement)
Semiconductor applications
-EPI-lay thickness
-resistivity measurements
-doping profiles
Polymer analysis
-Similar to FTIR spectroscopy, but with all the benefits of ellipsometry: sensitivity to ultrathin films, opaque substrates, multilayers, etc.

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- Vacuum Ultraviolet ellipsometer
- Vase ellipsometer
- MASE M-2000® ellipsometer
- FPM-2000 ellipsometer designed for the display industry

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List of articles in this sub-category

- FilmTek 2000SE spectroscopic ellipsometer
- SpecEL 2000 spectroscopic ellipsometer
- Vacuum Ultraviolet ellipsometer
- Vase ellipsometer
- MASE M-2000® ellipsometer
- FPM-2000 ellipsometer designed for the display industry

List of all articles in this sub-category Spectroscopic ellipsometry

List of all articles in this sub-categoryList of all articles in this sub-categoryList of all articles in this sub-category