Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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Our MICROMAZE trap contains a labyrinth of flat plates arranged so that a gas molecule must collide many times with them during its travel through the trap. Each plate is a highly porous, glass-like proprietary material with a surface area estimated at approximately 200 square meters per gram. The pores vary in size but center around a diameter effective for trapping polar and non-polar molecules (water and oil). The labyrinth structure makes an extremely effective foreline trap, ideal for preventing mechanical pump oil vapors from migrating into the chamber.

These traps will extract corrosive material or solvent vapor from the chamber gas before it enters the mechanical pump, however the effective life of a MICROMAZE trap may shorten if used in vacuum process systems producing large quantities of fluorine or hydrogen fluoride.

Each plate weighs approximately 25 grams and each trap has four plates. Hence, after the trap has been baked for regeneration, the total surface area takes up roughly 20,000 square meters. Assuming this surface will adsorb a vapor to a depth of one molecular layer, and further assuming the vapor's molecular weight is 100 and diameter is 5 angstrom, we can calculate the trap's capacity is about 2 grams of vapor. MICROMAZE can adsorb all gasses*.

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List of all articles in this sub-category Vacuum components and systems

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