Category : Semiconductor equipment > Wafer test/inspection and measurement systems

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Keithley Instruments, Inc. (NYSE:KEI),a leader in solutions for emerging measurement needs, has developed a packaged, ready-to-run parametric test system with unrivaled cost-per-pin and total price/performance ratio. The Model S470 Parametric Test System is optimized for production testing of 200mm wafers at the 130nm CMOS node and beyond.

High Throughput, Accuracy, and Flexibility

The Model S470 quickly and accurately takes a wide range of I-V and C-V measurements on CMOS, bipolar, and GaAs ICs, including automotive and telecom ICs, LCDs, and more. The system's exceptional ease of use increases its overall test value by speeding and simplifying both test programming and day-to-day operation.

The Model S470 bundled system comes in a 24-pin configuration, including probe card adapter and cabling, with full guarding and Kelvin connections to the probe needles. The base system includes four DC I-V source-measure units, 100 kHz capacitance/conductance meter, picoammeter, and system reference unit with calibration and diagnostics software. The picoammeter is routable to all pins and provides a measurement resolution of less than 10fA. The high-speed/low-current air matrix switching cards are similar to the popular Keithley 707A/7174A cards and provide fast settling times. The result is measurements with high integrity at production throughputs.

The KTE v5.1 operating software provides a robust platform for test development, recipe selection, and test execution. Standard CMOS and BiCMOS measurement libraries are included, and new algorithms can be created with the included C-language compiler. Like all recent Model S400 Series testers, KTE runs on a Sun controller usingthe Solaris UNIX operating system. System software documentation is on a CD-ROM. On-site system installation and one-year warranty are included.

System options include:
Up to 4 additional DC I-V source-measure units
Expansion to 36 or 48 pins
RF option for 40GHz non-extrapolated s-parameter measurements
High speed 1MHz or multifrequency capacitance meter for advanced dielectrics
Medium current pulsed voltage source for flash and charge pumping applications and for measuring up to 2A of current
Microvoltmeter for monitoring copper processes
Pulse generator (up to two, each with single or dual channel)
Frequency counter or spectrum analyzer for ring oscillator measurements
Keithley Recipe Manager for automated version control and recipe fanout with ISO-9000 traceability for recipes
Adaptive test for automated first-level process diagnostics

Availability

Orders are being accepted immediately for delivery 90 days ARO. Consult the factory for system pricing based on installed options or for availability of upgrades from earlier S400 Series systems. For more information on the Model S470 Parametric Test System, or any of Keithley's semiconductor test solutions, contact the company at: www.keithley.com


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