Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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Linear Sample Transfer System with Load-lock Chamber:
'Railroad' Sample Transfer System
Sample Load Lock Station and Buffer Chamber
Sample storage up to 6 specimen
2" Substrate Size (larger wafer size handling available)
Sample Degassing Station

Growth Chambers:
UHV Growth Chamber with cryo-shroud
8 (or more) Ports for Effusion Cells, E-Beam Evaporators, Plasma Source
8 (or more) Ports for pneumatically (electrically, manually) operated Shutters
Heatable Sample Manipulator up to 1300°C, automated Sample Rotation
Ports for In-Situ Characterization Tools, RHEED, Flux Monitor, Pyrometer, RGA
Pumping System: Ion Pump with Integrated Titanium Sublimation Pump, Turbo Molecular Pump and Cryopump, Base Pressure: <1x10-11 mbar
A hermetically sealed shutter system seperates the vacuum vessels.

List of all articles from this supplier

- Macro-Molecular Beam Injector
- Point projection microscope
- RF Plasma Atom Sources
- Reflection High-Energy Electron Diffraction gun

List of all articles from this supplier

List of articles in this sub-category

- Vacuum accessories such as filters and switches
- Vacuum suction cups
- Mounting set for square profiles
- MCH Suction cup holders
- O-Ring Sponge
- Air silencers

List of all articles in this sub-category Vacuum components and systems

List of all articles in this sub-categoryList of all articles in this sub-categoryList of all articles in this sub-category