Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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The Marathon Express® 400 (MX400) platform is a low cost four-sided process integration system with a single load lock and three process facets The MX400 is ideally suited for large non-MESC process modules such as those used in MR Head manufacturing. The MX400 is also utilized in Ashing and other single process module applications where cost is important. The MX400 will handle substrate sizes from 100mm to 200mm round

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- 8000 Gemini Express
- FabExpress™ designed to handle 200mm to 300mm Semiconductor Wafers
- MagnaTran 7 robot
- MX600 Vacuum Cluster Tool Integration Platform

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- Vacuum accessories such as filters and switches
- Vacuum suction cups
- Mounting set for square profiles
- MCH Suction cup holders
- O-Ring Sponge
- Air silencers

List of all articles in this sub-category Vacuum components and systems

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