Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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The Marathon Express® 600 (MX600) platform is a low cost six-sided process integration system with two load locks and four process facets. The MX600 is ideally suited for applications with two process modules such as Ash or RTP. The MX600 will handle substrates from 100mm to 200mm round.

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- 8000 Gemini Express
- FabExpress™ designed to handle 200mm to 300mm Semiconductor Wafers
- MagnaTran 7 robot
- MX400 Vacuum Cluster Tool Integration Platform

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- Vacuum accessories such as filters and switches
- Vacuum suction cups
- Mounting set for square profiles
- MCH Suction cup holders
- O-Ring Sponge
- Air silencers

List of all articles in this sub-category Vacuum components and systems

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