Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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The MagnaTran® 7 (MAG 7) robot is Brooks Automation's most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 million MCBF.

MagnaTran 7 is available in 2-axis (R, ø) and 3-axis (R, ø, Z) models, with four different patented arm configurations in various sizes, and with a variety of passive support end effectors for handling up to 300mm size wafers and similiar substrates.

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- 8000 Gemini Express
- FabExpress™ designed to handle 200mm to 300mm Semiconductor Wafers
- MX600 Vacuum Cluster Tool Integration Platform
- MX400 Vacuum Cluster Tool Integration Platform

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- Vacuum accessories such as filters and switches
- Vacuum suction cups
- Mounting set for square profiles
- MCH Suction cup holders
- O-Ring Sponge
- Air silencers

List of all articles in this sub-category Vacuum components and systems

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