Category : Instrumentations for fluid management, control and transfer (gas and liquids) > Valves

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Area of application: The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.
Description: Mini-UHV-gate valves are for many applicatiaons. They can be provided with various actuators. The mechanism is free of lubricants.
Nominal inside diameters (ID): 25 (1") - 50 (2")
Body material: Stainless steel
Actuator types: Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC)
Feedthrough: Bellow
Sealing technology: MONOVAT-System
Sealing materials: Bonnet: Metal / Gate: Viton®
Cycles until first service: 50'000 cycles
Leak rate: Body: < 5 . 10-10 mbar ls-1
Valve seat: < 1 . 10-9 mbar ls-1

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List of all articles in this sub-category Valves

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