Category : Motion control, positioning stages > Nanopositioning (components and systems)

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PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, semiconductor and life science applications offers one of the smallest motorized stage families in the world, capable of delivering 50 nanometer incremental motion.

- One to 4 Axis Systems, Very Compact, from 62x60 mm Footprint :
The M-110 series translation stages provide linear motion of 5, 15 and 25 mm. X, XY and XYZ systems are available, and can be combined with the M-116 miniature rotary stage. The systems can also be equipped with high-speed piezo drives for scanning or positioning with nanometer precision.

- Typical Applications :
Biotechnology, Metrology, Micromachining, Medical technology, Micromanipulation, Photonics Packaging.
- Features & Advantages :
Folded Drives Provide Footprint as small as 62x60 mm (~2.5x2.4 in)
50 nm True Minimum Incremental Motion (7 nm Motor / Encoder Resolution!)
5, 15 and 25 mm Linear Travel Ranges, 360 deg. Rotary Range
Choice of Lead Screw Drives (lower cost) and Ball Screw Drives (Higher Speed / Continuous Operation)
Choice of Closed-Loop DC Motors (higher precision) and Stepper Motors (Lower Cost)
Integrated Hall-Effect Limit and Reference Switches
Piezo Option for fast Scanning / Positioning with 1 nm Resolution

- Choice of Motors and Drives :
Lead screws (higher resolution) and ball screws (higher speed / longer lifetime) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision). The encoder on the DC servo motor version features 0.007 µm resolution per count.

- Hybrid Option with High-Speed Piezo Scanner :
For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages. It provides 1 nm resolution and response times of a few milliseconds.

- Controllers :
A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs. Software for alignment applications is also available.

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List of all articles in this sub-category Nanopositioning (components and systems)

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