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Category : Semiconductor equipment > Compound semiconductors

Multi-wafer MOCVD reactors

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Thomas Swan, UK, a subsidiary of AIXTRON, offers a range of vertical MOCVD reactors which are based upon the Close Coupled Showerhead (CCS) concept recognised as a robust route to uniformity and scalability. The CCS technology is used by Thomas Swan in its current range of multi-wafer MOCVD reactors. Successful implementation of this technology has provided a wide range of susceptor-substrate options applicable to both R&D and high volume production for InP, GaAs and GaN (Gallium nitride) materials with a maximum capacity of 19x2”.

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