The NTS-10/NTS-100 are a software-controlled linear nanopositioning systems that combine incredible high-resolution incremental movement and extended travel range to 10 mm (NTS-10) or 100 mm (NTS-100). The systems offer long-term stability in open loop mode of less than 2 nm drift/hour at 20篊 for high repeatability and accuracy.
The NTS-10 and NTS-100 support heavy loads of up to 3 kg and can be used in a variety of nanopositioning applications including metrology, semiconductor analysis, microscopy, cell manipulation, microlithography and fiber optic alignment.
Features
High-resolution motion increment of 0.4 nm
Extended travel distance of up to 10 mm
Long-term drift in open loop is less than 2 nm/hour @ 20 篊 for high repeatability and accuracy
DSP controllers for 1-, 2- or 3-channel configurations; enables wide dynamic range and high measurement accuracy
PC-based software for real-time display and control
Travel velocity of up to 2000 祄/s in six orders
Continuous or stepping modes
Self-locking feature eliminates backlash and the "stick-slip" effect
Acceleration time to maximum velocity is <0.3 ms
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