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Category : Motion control, positioning stages > Nanopositioning (components and systems)
NTS-10 and NTS-100 Linear Nanopositioners
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Nanometer positioning with 10 mm (NTS-10) and 100 mm (NTS-100) travel! The NTS-10/NTS-100 are a software-controlled linear nanopositioning systems that combine incredible high-resolution incremental movement and extended travel range to 10 mm (NTS-10) or 100 mm (NTS-100). The systems offer long-term stability in open loop mode of less than 2 nm drift/hour at 20篊 for high repeatability and accuracy. The NTS-10 and NTS-100 support heavy loads of up to 3 kg and can be used in a variety of nanopositioning applications including metrology, semiconductor analysis, microscopy, cell manipulation, microlithography and fiber optic alignment. Features • High-resolution motion increment of 0.4 nm • Extended travel distance of up to 10 mm • Long-term drift in open loop is less than 2 nm/hour @ 20 篊 for high repeatability and accuracy • DSP controllers for 1-, 2- or 3-channel configurations; enables wide dynamic range and high measurement accuracy • PC-based software for real-time display and control • Travel velocity of up to 2000 祄/s in six orders • Continuous or stepping modes • Self-locking feature eliminates backlash and the "stick-slip" effect • Acceleration time to maximum velocity is <0.3 ms
Article from Ocean Optics, Inc.
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