Category : Motion control, positioning stages > Nanopositioning (components and systems)

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The ALIO Industries 6-axis parallel kinematic robotic system (Hexapod) promises to revolutionize the manufacturing processes of products requiring nanometer resolution and repeatability. With up to 5 nanometer resolution revolving around a virtual point in space coupled with speeds of up to 110mm/sec this robotic product forms the basis of the next generation of automated nano-positioning systems for the most demanding applications in photonics packaging, test & measurement, semiconductor manufacturing processes, micromachining , and life sciences.

Compared to a conventional stack of Cartesian stages a Hexapod design has advantages in stiffness and the low inertia of the moving platform. The Alio Industries AI-Hexapod is a compact unit based around patented Nanomotion linear piezo motors with a scaleable travel range in a 20mm to 150mm cube. These motors use 5nm interpolated non-contact encoders in servo mode but can be operated at 1nm resolution in an optional DC mode. With no voltage applied the stage is rigidly clamped in position by the motors – an ideal scenario for fiber optic packaging applications and processes where it is necessary to hold position for the duration of a measurement.

The design of the stage means that it can be used in high-vacuum environments down to 10e-10 Torr at up to 130°C bakeout and is clean-room compatible (Class 10). These systems also have no electromagnetic generation.

Control is supplied by the Delta Tau UMAC Turbo which takes care of all Forward and Inverse kinematics calculations without the need for an external computer.

The AI-Hexapod is complemented by a full range of linear and rotary stages all based around the same piezo-motor technology.

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List of all articles in this sub-category Nanopositioning (components and systems)

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