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Category : Laser components, systems, equipment and applications > Solid state lasers

New 20W UV Laser for Microelectronics Applications

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Santa Clara, Calif., June 20, 2005 – The new AVIA™ 355-20 from Coherent, Inc. (Santa Clara, CA) (Nasdaq: COHR) is the first all-solid-state Q-switched laser to offer 20W of 355 nm ultraviolet output at 100 kHz. The AVIA 355-20 can be operated at pulse repetition rates as high as 150 kHz, while maintaining excellent beam characteristics and low-noise performance. The combination of high power and high pulse rate translates directly into higher processing speeds for micromachining applications, such as wafer dicing, via drilling, processing low-k dielectrics, large-area solar cell scribing, and chip singulation.

The AVIA 355-20 is a frequency-tripled, vanadate laser utilizing a proprietary end-pumped architecture to deliver a high quality beam (M2 < 1.3) with high efficiency over a long lifetime. The entire resonator configuration is packaged in a single, sealed module, in which all the optics are rigidly soldered using Coherent’s field-proven PermAlign™ technology. The laser’s pump diodes are mounted inside the laser head, and fiber-coupled into the sealed resonator. This unique architecture enables diode replacement to be done in the field without any optical realignment, and allows the laser head, umbilical and power supply components to be completely detached for easy installation in OEM machines.

Article from Coherent, Inc.


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