Category : Motion control, positioning stages > Scanning stages

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Physik Instrumente, world leaders in nano-positioning have introduced the P-563.3CD using the company's proprietary PImars technology.

The new XYZ positioner has a 300 x 300 x 300µm travel range with millisecond response times, nanometre resolution and a 66 x 66mm clear aperture. A variety of analogue and digital controllers is available in bench-top, OEM-board or rack-mounted formats. Versions can be produced in invar, super-invar or titanium and vacuum compatible models are also available.

The design principles of PImars allows multi-axis stages to operate with only one moving part unlike systems using two or three individual stacked modules. The parallel-kinematic design is complemented by a parallel-motion metrology feedback system allowing significantly better overall precision in all axes.

Typical applications of PImars stages will be found in biotechnology, nano-technology, AFM and SPM scanning microscopy, nano-manipulation, nano-printing and semiconductor and data storage test equipment.

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List of all articles in this sub-category Scanning stages

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