Category : Motion control, positioning stages > Nanopositioning (components and systems)

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Long-Travel XYZ Piezo Scanning Stage and Nanomanipulation Tool

Nanopositioning specialist PI introduces the P-563.3CD PIMars, a new, long-travel piezo scanning / nanomanipulation system. The piezo scanning stage provides resolution in the nanometer realm and 300x300x300 µm travel in XYZ, significantly more than other systems currently available. Integrated capacitive feedback and closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.

Typical Applications: Bio-Technology, Nanotechnology, SNOMs, AFM & SPM Scanning Microscopy, Nano-Manipulation, Nano-Imprint, Semiconductor & Data-Storage Test Equipment.

How do PIMars Piezo Scanning Stages Work?
PIMars stages incorporate high-force solid state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors. The high force of the solid state piezo actuators allows for fast response in the millisec range and high scanning frequencies.

How do PIMars Piezo Scanning Stages Differ from other Nanopositioning Stages?
PIMars™ stages are based on a different design principle than conventional scanning stages. The XYZ system consists of only one moving part, a single module rather than three individual stacked modules, as common in other XYZ systems. This “parallel-kinematics” mechanical design is complemented by a parallel-motion metrology feedback system.

With parallel-metrology, all sensors “look” at the moving platform “from the outside” and can “see” off-axis and runout errors. The controller then eliminates unwanted motion in real-time. Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors. Parallel motion metrology allows for significantly higher overall XYZ precision.

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List of all articles in this sub-category Nanopositioning (components and systems)

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