Category : Motion control, positioning stages > Nanopositioning (components and systems)

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Piezo specialist PI provides a variety of ultra-fast piezo-driven mirror scanners. Lately, a new device with an optical deflection range of 6 degrees (world record for piezo scanners) was added to the spectrum.

How do they Work?
Piezo steering mirrors are driven by high-performance piezoceramic actuators providing much higher forces than magnetic actuators and acceleration to 10,000 g’s. This makes them ideal for fast image correction applications even with large mirrors of 4 to 12”
diameter. For minimum friction and maximum guiding precision and lifetime, frictionless flexures are integrated in the system to control the trajectory of the mirror. Position sensors feed the exact position information back to a piezo controller and allow
for angular resolution down to the nano-radian realm.

Advantages over Galvo Scanners:
Piezo steering mirrors have three advantages over the widely used galvo scanners: They are smaller, have higher scanning frequencies (in the kiloherz range) and achieve better linearity in two-axis scanning arrangements, because they feature a common pivot point,
with only one moving mirror.

Typical Applications: Multi-Axis Laser Beam Scanning, Fast Beam Steering, Resolution Enhancement, Image Dithering & Stabilization, Scanning Microscopy, Compensation of Errors in Optics, Semiconductor Test & Measurement Equipment, Metrology, Optical Telecommunication

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List of all articles in this sub-category Nanopositioning (components and systems)

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