Point projection microscope

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The atom probe is a point projection microscope capable of resolving the chemical identity and position of individual atoms in 3D with atomic resolution in the z direction and subnanometer lateral resolution. The tool usually requires a needle shaped sample of solid conducting material.

The atom probe is capable of both analyzing a sample with sensitivities that no other system can match and providing a positional accuracy of individual atoms that is unmatched. The analytical information is obtained by counting, identifying and spatially locating individual atoms.

Other competitive analytical tools function by either impinging the surface of a sample with a species and obtaining information from the reflection or transmission of the species (XRD, SEM, TEM) OR impinging the surface of a sample with a species and driving off the constituent atoms of the sample (sputtering) in order to identify the chemistry of the material present (RBS, SIMS).

Compared to the atom probe, these methods are limited in their lateral and spatial resolution - the minimum length scale they can analyse is defined by the size and depth penetration of the incident beam. They determine concentrations and compositions of atoms present by analysing the signal from a minimum volume defined by the beam dimensions and characteristics. But they cannot be used to determine the exact 3D position of the atoms within the sample (XRD, RBS, SIMS, TEM, SEM).

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List of all articles in this sub-category Microscope, micro-inspection system, microscope accessories

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