Category : Cameras, image sensors, imaging systems, scanners, thermography, UV viewers > Scanners

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Whether it is wafer bumping, flat panel displays, or high density interconnects, technology roadmaps are pushing past the capability of contact and proximity exposure tools.

Tamarack’s projection scanner is unique in its ability to accurately expose very large substrates, up to 850mm x 1025mm, without the typical proximity printer’s problem of maintaining accurate gaps across large areas, or a stepper’s requirement of matching and stitching adjacent fields.

The substrate is exposed by continuously scanning a diamond shaped UV beam 30 to 45 mm on a side in a serpentine pattern over the entire area, resulting in illumination uniformity within +/-3%. This method also maintains higher throughputs than typical step and repeat approaches.

Imaging is provided through an intermediate resolution broadband lens, capable of resolving down to 4 microns, with large depth of focus to assure effective imaging in ultra-thick photoresist.

All critical subsystems are designed to maximize yield, from noncontact air gages capable of placing the surface of a substrate within +/-4 microns of the desired exposure plane, to wavelength selectivity for process optimization, and state of the art pattern recognition based alignment accuracy of +/-2 microns.

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List of all articles in this sub-category Scanners

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