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Category : Semiconductor equipment > Process control systems
Q24Overlay Metrology Control
As more and more Caliper elan customers are finding, the technology now incorporated in the Q240AT provides the ability to perform across an entire process, not just the easy levels. With a combination of new features and substantial improvements in optics and software, Accent's overlay registration has proved itself in all the key areas to provide control at the levels needed for the most advanced levels of production. Q240AT provides consistent, effective capability on difficult low contrast and grainy levels, freeing process engineers from the time-wasting re-optimization common among other overlay measurement systems. What's more, Q240AT is uniquely able to perform at its best without the use of "special features" that result in lower throughput.
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