Category : Vacuum technologies, high vacuum and UHV components > Vacuum components and systems

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Features:
New RF Auto Tuning Unit for inductively coupled Plasma Source

RF Atom Source: Inductively coupled - 13.56 MHz

Unique coaxial design: For easy mounting on vitually all vacuum systems.

Operation at Low Flux for Dilute Nitrogen Growth Applications (GaAsN)

Continously tunable from very small to very high atom fluxes

Filamentless design: The absence of a hot filament to create the plasma, permits operation with most gases including reactive gases such as O2, chlorine, N2, and H2.

Integral water cooling jacket: For minimum system heat load.

The Oxford Scientific RF plasma source is a truly UHV compatible source. Fully bakeable, with an all-welded stainless steel vacuum envelope, and outstanding cooling from a water-jacket which surrounds the hot zone, it is suitable for use in vacuum levels ranging from HV to those found in the most demanding MBE applications.

The RF Plasma Atom Source is intended principally for low energy and low damage surface treatment and sample growth. A specially designed aperture inhibits the release of ions from the plasma while allowing neutral atoms and molecules to effuse out. The particles released are largely thermalised (<1eV) and are therefore suitable for use in sensitive semiconductor growth, cleaning and surface treatment applications. Any residual ion current can be removed using the ion trap option where this may be of concern.

The water circuit is an entirely stainless steel (no copper tubing) welded construction giving excellent mechanical, thermal and therefore operational stability.

List of all articles from this supplier

- Macro-Molecular Beam Injector
- Point projection microscope
- Reflection High-Energy Electron Diffraction gun
- MBE bio-organic system

List of all articles from this supplier

List of articles in this sub-category

- Vacuum accessories such as filters and switches
- Vacuum suction cups
- Mounting set for square profiles
- MCH Suction cup holders
- O-Ring Sponge
- Air silencers

List of all articles in this sub-category Vacuum components and systems

List of all articles in this sub-categoryList of all articles in this sub-categoryList of all articles in this sub-category