Category : Instrumentations for fluid management, control and transfer (gas and liquids) > Valves

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Area of application: The series 024 transfer valve has been developed for Flat Panel Display (FPD) production systems. It is mainly used for isolation of loadlock, transfer and process chambers.
Description: Transfer valves for load lock / process module isolation. The valves work virtually particle and vibration-free. Outstanding up-time: more than 1 million cycles between maintenance. Opening sizes up to 150 mm x 1250 mm are possible.
Nominal inside diameters (ID): 50x800 (1.97"x31.50") - 150x1250 (5.91"x49.21")
Body material: Aluminum
Actuator types: Pneumatic actuator (double acting)
Feedthrough: Shaft feedthrough with pump port
Sealing technology: MONOVAT-System
Sealing materials: Bonnet: Viton® / Gate: Viton®
Cycles until first service: ≥ 1 million cycles
Leak rate: Body: < 1 . 10-9 mbar ls-1
Valve seat: < 1 . 10-9 mbar ls-1

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