Category : Semiconductor equipment > Wafer test/inspection and measurement systems

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The CAMECA SIMS 4550 is the benchmark quadrupole SIMS with top performances in depth profiling.
The key points ensuring its success are:

Reference performances in high depth resolution analysis. This derives mainly from:
- Oxygen and cesium Floating Low energy Ion Gun technology (FLIG), exceeding by far the performance of conventional or extraction floating ion columns used in other conventional SIMS.
- A total flexibility concerning the primary ion angle of incidence, even in unattended chained analysis.
- A low field of extraction of the quadrupole analyzer facilitating the use of low energy primary ions.


Reference performances in automation and reproducibility for metrology, deriving mainly from:
- a superior redesign of the quadrupole analyzer optics (extraction, transfer, gating, post-acceleration),
- a user-friendly chain analysis software and a renowned ease of use of the instrument, reducing the need for highly-trained operators,
- ultra stable ion sources and electronics for unattended overnight measurements

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List of all articles in this sub-category Wafer test/inspection and measurement systems

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