Category : Vibration control equipment, optical tables > Vibration control equipment

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STACIS® 2100 is the world's most advanced active vibration cancellation system. Employing advanced inertial vibration sensors and state-of-the-art piezoelectric actuators, STACIS® 2100 cancels vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric actuators to filter out floor motion. Isolation starts at 0.6 Hz and the active bandwidth is 250 Hz.

Primarily designed to isolate precision Microlithography, Metrology, and Inspection Equipment in advanced semiconductor factories , STACIS® 2100 is now the industry standard solution for the most sensitive instruments in noisy environments. Hundreds of times stiffer than air isolators, STACIS® 2100 suffers from none of the limitations of air systems. There is no "soft" suspension and, unlike active air systems, STACIS® 2100 can be "stacked" (placed beneath tool with an internal active air isolation system).

Furthermore, In addition to facilitating optimal tool performance and resolution in noisy fabs , STACIS® 2100 is guaranteed to meet the floor vibration specifications of wafer inspection, metrology and microlithography tools With many hundreds of successful installations worldwide, STACIS® 2100 is the ideal vibration isolation system for the most vibration sensitive instruments.

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- Electro-Damp® for the control of pneumatic vibration isolation systems
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List of articles in this sub-category

- Standard Wire Rope Isolators
- Electro-Damp® for the control of pneumatic vibration isolation systems
- Type II Faraday Cage
- Mag-NetX Magnetic Field Cancellation System
- Acoustic/Vibration Isolation Chamber
- Faraday Cages electro-magnetic isolation system

List of all articles in this sub-category Vibration control equipment

List of all articles in this sub-categoryList of all articles in this sub-categoryList of all articles in this sub-category