Category : Temperature measurement and control instruments > Controllers

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The TCU 40/80 Plus is a single-channel temperature control unit which offers enhanced heat load capacity, making the unit ideal for the cooling of wafers during 300mm etch as well as other advanced semiconductor manufacturing processes. The system is designed for high reliability, up-time performance, and ease of maintenance, providing continuous trouble-free operation across wide temperature extremes for reduced cost of ownership. This, combined with the BOC Edwards global service support organization, makes the TCU 40/80 Plus the new industry standard.

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List of all articles in this sub-category Controllers

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