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Category : Materials sciences - components and test equipment > Chemical vapor deposition

The EasyTube NanoFurnace from FirstNano - For easy growth of carbon nanotubes.

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The EasyTube™ incorporates the field's most advanced catalyzed chemical vapor deposition process giving both scalability and compatibility with MEMS and IC fabrication. Recipe-driven software allows intuitive, repeatable operation while providing maximum flexibility.

The EasyTube NanoFurnace is the only turn-key packaged solution on the market that delivers a ready-to-use system for growing single-walled nanotubes [SWNT] and multi-walled nanotubes [MWNT] the day it is installed. First Nano also provides catalysts and experimental substrates to facilitate basic research and to provide a platform for advanced research.

The EasyTube System features

- An ultra short stainless steel / VCR gas path for minimal hysteresis and maximum process control.
- Custom quick-change quartz for fast reconfiguration and maximum cleanliness.
- Automated sample loading to reduce contamination and increase repeatability.
- 100% automatic data logging of recipes and run data insure the availability of important data even if laboratory notebooks are lost.
- Intuitive graphical user interface for simple data management.
- Fully programmable temperature and gas flow feedback loops for maximum versatility and
flexibility.

The EasyTube System software is driven by an intuitive graphical user interface mounted to a control station independent of the NanoFurnace. Its simple interface is supported by a robust platform that automates a number of tedious and error prone processes. The software contains pre-programmed recipes that will immediately produce single or multi walled nanotubes. These recipes set all process parameters, i.e. types of gases used, flow rate/duration, temperature. The EasyTube software also provides simple GUI interfaces for writing and storing custom recipes, and for viewing previous runs and run data.

The EasyTube features automatic inert gas purge, and process interlocks triggered by sensors that check for internal gas leaks, exhaust flow, enclosure integrity, and sample loader position. Because flammable gases and high temperatures are required for nanotube growth, simple operator errors, or changes in the environmental conditions, can result in potentially dangerous situations. These conditions have previously let explosions in laboratories that have resulted in physical injury and destruction of property. The interlocks in the EasyTube ensure safe operation and minimize the possibility of harm to the operator.

Article from L.O.T. - Oriel Ltd


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- Reverse Engineering & Rapid Prototyping Workshop, 14th February 2005, University of Birmingham

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