Titan scribing laser system

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The Titan is a high performance scribing laser system designed to run at a higher throughput. System has the capability with and without the backside alignment option. System with the backside alignment contains a linear X-Y stage with an automated rotational (theta) stage.

The AccuScribe Titan is the successor to New Wave Research's already acclaimed laser-based wafer scribing systems (SS40). The AccuScribe tool is a field-proven, cost-effective scribing laser system. The AccuScribe produces consistently clean, die scribed lines at a uniform depth resulting in superior die singulation yield for LED manufacturers. Similar to its predecessor, the AccuScribe Titan is ideal for the 24/7 production environment. Titan includes robust design with enhanced features that allows for easy alignment of the wafer. It accommodates industry-standard blue film expansion frames, performs both full and partial wafer scribing, and features an automatic edge detection capability.
A new focus position mechanism has been added along with a precision X-Y stage to ensure consistent laser focus and scribe depth during the scribing operation. Titan also offers a backside alignment option which allows users to scribe non-transparent wafers.

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