Category : Optics (components, coatings, instruments and systems) > Light sources, lamps

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Vacuum UV (VUV) lamps are deuterium lamps that are especially designed to supply deep UV light down to a wavelength of 112 nm. The spectral range covers 110 nm to 350 nm with especially high intensity between 120 nm and 160 nm.

They are used for :

- HPLC
- high resolution optics (e.g. quality assurance)
- semiconductor exposure
- cleaning of silicon wafer surfaces
- photo-chemical processes with high photon energy
- and many other applications.

Heraeus is specialized on high power VUV lamps with up to 250 W. The D200 lamps come equipped complete with a cooling jacket for easy installation in water cooled operations. Specially designed power supplies are available for use with Heraeus VUV lamps.

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List of all articles in this sub-category Light sources, lamps

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