Violet diode laser for Metrology

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The iFLEX-2000™ 405 is a fiber coupled semiconductor diode laser with integrated temperature control delivering optical powers of >10mW at 405nm. This makes the laser a reliable and compact source for high resolution defect analysis by Scatterometry.

Low Wavefront error and a highly polarized beam also make the laser ideal for Ellipsometry applications. The laser also features a temperature fail safe and interlock with a modular plug & play architecture for ease of installation and service.

Optical fiber delivery produces beam pointing error <1µrad/ºC even from a cold start up. The stable TEMºº pure Gaussian beam combined with high direction stability, make this laser unmatched for resolution enhancement in thin-film metrology.

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List of all articles in this sub-category Laser diode instrumentation

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