Category : Motion control, positioning stages > Micropositioning (components and systems)

BUYER'S GUIDE

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The XM2000 provides repeatable, low friction motion, which makes it the ultimate solution for demanding manufacturing, test and measurement applications.


Newport XM2000 is the ultimate solution for the most demanding manufacturing, test and measurement applications. It meets ultra-precision motion requirements with high dynamics and reliability for 24/7 production environments. Typical applications include semiconductor wafer inspection, sensor test-and calibration, laser machining and ultra-precision assembly.

Unlike screw driven stages, the XM2000 employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultrasmooth velocity control and provides a higher efficiency compared to alternative stage designs. This results in significant less heat dissipation which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM2000 takes also benefit of a sophisticated length decoupling of the magnetic track from the stage carriage.

XM2000 stages are machined from stress-relieved 7075 aluminum ensuring long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control, to further improve overall performance and accuracy. The T-shape carriage used on the XM2000 provides the optimum solution for precision XY assemblies without impacting the stage preload. It also supplies a higher robustness and is more tolerant to non-ideal mounting conditions than stages with a C-shape carriage.

To ensure the most accurate trajectory control, XM2000 stages feature highclass matched pairs of anti-creep crossed roller bearings. The lack of any recirculating elements in the XM2000 leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers on these bearings prevent from bearing cage migration, which can occur with other linear bearings.

Precision position feedback is supplied by a high accuracy LIF 481 Heidenhain linear scale. The precision alignment and mounting of this low thermal expansion scale in the center of the stage minimizes the impact of temperature changes on stage repeatability and accuracy. The encoder signals are interpolated by Newport’s XPS motion controller with sub-nm resolution and less than 10 nm noise for outstanding position sensitivity and stability. Absolute home position and limit signals are incorporated on the same scale without any further electronics or mechanics for improved reliability and accuracy. In general, all electronics are attached to the stationary base. So there are no moving cables inside the stage resulting in an extremely compact design with exceptional reliability and safety.


XM2000 series stages represent the latest platform motion product from Newport and are built to order and tested to meet the stringent specifications listed below. For optimum performance and seamless compatibility, these stages should be used with our XPS motion controller/driver. Custom designs and system solutions for OEM applications are available upon request.

The XM2000 stages are available in two models and have the following specifications:

XM2000-S

Travel Range (mm) 50, 100, 160
Motion sensitivity (nm) 10
Bidirectional repeatability* (nm) 50
On-axis accuracy (µm) 1.5
Maximum speed (mm/s) 300
Max. acceleration (no load) (m/s2) 5
Max. force (continuous) (N) 20
Normal center load capacity (N) 100

XM2000-L

Travel Range (mm) 210, 310
Motion sensitivity (nm) 10
Bidirectional repeatability* (nm) 50
On-axis accuracy (µm) 3
Maximum speed (mm/s) 300
Max. acceleration (no load) (m/s2) 5
Max. force (continuous) (N) 60
Normal center load capacity (N) 300

To obtain more information about this product, please contact your local Newport sales office.

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