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Category : Motion control, positioning stages > Nanopositioning (components and systems)

XY200M - A new design of XY piezo stage for nanopositioning applications

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The XY200M is an XY piezo stage coming from CEDRAT TECHNOLOGIES lab and which was newly designed according to space needs defined with CNES (the French space agency). This XY stage benefits from the heritage of a former XY stage developed for ESA (European Space Agency) in the frame of Rosetta / Midas space mission which will launch in the beginning of 2003. It is based on two pairs of APA200M, Amplified Piezo Actuators displaying 200 µm of stroke each, arranged in cross configuration around a central ring (see figure). The mechanism allows a displacement of +/- 100 µm along the two orthogonal X and Y axis with very low parasitic motions (out of plane displacements and rotations around the Z direction). In order to achieve the two X and Y displacements, each pair of APA200M is electrically driven in push pull configuration, so the device only requires two output channels from the standard driving electronics LA75A-2 of CEDRAT TECHNOLOGIES. In the context of this R&T CNES project, the aim was to space evaluated this concept of self thermo-mechanically centred stage. For instance this device passed the launch vibrations test with an payload mass of 0.1 kg without neither clamping nor latching mechanism. The central ring motion can be precisely controlled using either strain gages (SG option) or capacitive sensors (CS option). Taking benefit of the innovations brought in this space version, CEDRAT TECHNOLOGIES decided to upgrade its industrial standard version of the XY200M in order to offer the state of the art to its customers. Applications targeted are nanopositioning of lenses, mirrors and CCD or LCD sensors, 2D scanning…

Article from CEDRAT TECHNOLOGIES


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