Category : Semiconductor equipment > Wafer test/inspection and measurement systems

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CMP FOR 200MM AND 300MM FAILURE ANALYSIS AND R&D
Strasbaugh's nHance CMP system (model 6EG) is an economical tool for CMP research, failure analysis, and low-volume production. Its semi-automatic operations are programmable through a color, touch-screen GUI for repeatable and accurate process control. Featuring advanced technologies, the nHance ViPRR Carrier and Hydro-Lift Load Station minimize contamination and deliver superior, center-to-edge uniformity.

nHance uses the same process control methods, wafer carrier, load station, and pad conditioner as Strasbaugh's fully-automated nTegrity (6DS-SP) CMP system, easing the transition from development to production. nHance is the affordable solution, providing the benefits of state-of-the-art CMP at a low cost.


Failure Analysis & Yield Enhancement via the nHance's WholeWaferDeconstruct process
CMP Process recipes are transferable to Strasbaugh's fully automated 200mm nTegrity system for high-volume production
ViPRR carriers reduce edge exclusion, control center-to-edge uniformity, and improve overall performance and reliability
Hydro-Lift Load Station and spindle flush eliminate front-side contact and reduce contamination
Programmable pad conditioning increases the lifetime of the pad and improves WIWNU Operations are programmable through a color, touchscreen GUI
Minimal maintenance lowers the cost of ownership
Small footprint makes the nHance system convenient for small labs

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List of all articles in this sub-category Wafer test/inspection and measurement systems

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